| dc.contributor.author | Jatisukamto, Gaguk | |
| dc.date.accessioned | 2019-02-07T03:31:53Z | |
| dc.date.available | 2019-02-07T03:31:53Z | |
| dc.date.issued | 2019-02-07 | |
| dc.identifier.issn | 2620-8741 | |
| dc.identifier.uri | http://repository.unej.ac.id/handle/123456789/89574 | |
| dc.description | JETM: Jurnal Energi dan Teknologi Manufaktur, Vol. 01, No. 01, Bulan Juni Tahun 2018, hal. 07 –10 | en_US |
| dc.description.abstract | Micro machining technology uses AISI 410 steel as tools and surgical equipment. AISI 410
steel is hardenable so it is relatively easy to repair its mechanical properties. The weakness
of heat treatment in AISI 410 steel for small dimensioned components causes distortion.
Therefore, in this research, an effort to improve the mechanical properties of AISI 410 steel
using physical vapor deposition (PVD) technique. The method of this research is to
deposition Ti-N, Cr-N, W-N and Al-N with D.C magnetron sputtering technique. The
sputtering process is carried out at room temperature by bombarding the target material
(coating) with Argon gas, so that the bombed atoms will be deposited on the surface of the
substrate (coated material). The results showed that the film layer deposition properties
on the surface of AISI 410 steel were influenced by the characteristics of the formed nitride
layer and the size of the atoms that struck the surface of AISI 410 steel. | en_US |
| dc.language.iso | id | en_US |
| dc.subject | ISI 410 | en_US |
| dc.subject | mikro machining D.C magnetron sputtering | en_US |
| dc.subject | kekerasan | en_US |
| dc.subject | keausan | en_US |
| dc.title | Pengaruh Dimensi Atom Target D.C. Magnetron Sputtering Terhadap Sifat Mekanis Baja AISI 410 | en_US |
| dc.type | Article | en_US |
