Browsing LSP-Jurnal Ilmiah Dosen by Subject "d.c. magnetron sputtering"

Now showing items 1-1 of 1

Characteristic of AlN Layer Deposited by d.c. Magnetron Sputtering on AISI 410 Steel

Jatisukamto, Gaguk; Malau, Viktor; Ilman, Muhammad Noer; Iswanto, Priyo Tri (2019-04-10)

The aim of this study is to investigate the effect of AlN sputtering with d.c. magnetron sputtering on surface roughness, specific wear and corrosion rate of the AISI 410 steel. AlN thin film was deposited on AISI 410 ...