Characteristic of AlN Layer Deposited by d.c. Magnetron Sputtering on AISI 410 Steel
Ilman, Muhammad Noer
Iswanto, Priyo Tri
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The aim of this study is to investigate the effect of AlN sputtering with d.c. magnetron sputtering on surface roughness, specific wear and corrosion rate of the AISI 410 steel. AlN thin film was deposited on AISI 410 steel substrates using d.c. magnetron sputtering in discharging a mixture of N 2 and Ar gas. The influence of deposition time on the surface roughness, hardness, specific wear for the obtained films was evaluated by means of surfcorder, microhardness testing, and wear testing. The investigations of the electrochemical corrosion behavior of the samples were carried out using EG&G 273 Potentiostat/Galvanostat in three electrodes chamber. As the result, the surface treatments with d.c. magnetron sputtering methods increase hardness, but decrease corrosion rate and specific wear rate. Changes in wear rate and corrosion rate could be related to the surface roughness.
- LSP-Jurnal Ilmiah Dosen