Browsing by Subject d.c. magnetron sputtering
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Issue Date | Title | Author(s) |
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2019-04-10 | Characteristic of AlN Layer Deposited by d.c. Magnetron Sputtering on AISI 410 Steel | Jatisukamto, Gaguk; Malau, Viktor; Ilman, Muhammad Noer; Iswanto, Priyo Tri |